Qhov kub thiab av noo ntawm chav huv yog tsuas yog txiav txim siab raws li cov txheej txheem yuav tsum tau ua, tab sis nyob rau hauv cov xwm txheej uas cov txheej txheem yuav tsum tau ua tiav, tib neeg kev nplij siab yuav tsum tau muab coj los xav.Nrog rau kev nce hauv huab cua huv, muaj qhov sib txawv uas cov txheej txheem muaj ntau dua thiab nruj dua qhov yuav tsum tau ua ntawm kub thiab av noo.
Raws li qhov tseeb machining yog tau txais finer thiab finer, qhov yuav tsum tau rau qhov kub thiab txias hloov tau ntau dua thiab me dua.Piv txwv li, nyob rau hauv lub lithography raug cov txheej txheem ntawm loj-scale integrated Circuit Court ntau lawm, qhov sib txawv ntawm thermal expansion coefficient ntawm iav thiab silicon wafer raws li cov khoom ntawm lub diaphragm yuav tsum tau me me thiab me.Lub silicon wafer nrog ib txoj kab uas hla ntawm 100μm yuav ua rau ib tug linear expansion ntawm 0.24μm thaum kub nce los ntawm 1 degree.Yog li, nws yuav tsum muaj qhov kub thiab txias ntawm ± 0.1 degrees.Nyob rau tib lub sijhawm, tus nqi av noo feem ntau yuav tsum qis, vim tias tom qab ib tus neeg tawm hws, cov khoom yuav raug qias neeg, tshwj xeeb tshaj yog Rau cov chaw ua haujlwm semiconductor uas ntshai sodium, hom kev cob qhia huv no yuav tsum tsis pub tshaj 25 degrees.
Cov av noo ntau dhau ua rau muaj teeb meem ntau dua.Thaum tus txheeb ze av noo tshaj 55%, condensation yuav tshwm sim ntawm phab ntsa ntawm cov kav dej txias.Yog hais tias nws tshwm sim nyob rau hauv ib tug precision ntaus ntawv los yog Circuit Court, nws yuav ua rau ntau yam xwm txheej.Nws yog ib qho yooj yim rau xeb thaum tus txheeb ze humidity yog 50%.Tsis tas li ntawd, thaum cov av noo siab dhau lawm, cov hmoov av ntawm qhov chaw ntawm silicon wafer yuav raug tshuaj lom neeg adsorbed los ntawm cov dej molecules hauv huab cua mus rau saum npoo, uas nyuaj rau tshem tawm.Qhov siab dua qhov txheeb ze cov av noo, qhov nyuaj dua yog tshem tawm cov adhesion, tab sis thaum cov txheeb ze av noo qis dua 30%, cov khoom kuj tau yooj yim adsorbed rau saum npoo vim qhov kev txiav txim ntawm electrostatic quab yuam, thiab ib tug loj tus naj npawb ntawm semiconductor. cov khoom siv tau yooj yim tawg.Qhov kub zoo tshaj plaws rau silicon wafer ntau lawm yog 35 ~ 45%.